Tong, V; Mingard, K (2026) Measurement Uncertainties of Energy Dispersive X-Ray Spectroscopy in the scanning electron microscope (SEM-EDX/EDS). NPL Report. MAT 135

Preview

Text (NPL Report MAT 135) MAT135.pdf - Published Version Download (3MB) | Preview

Abstract

Fully quantitative elemental composition measurements using energy dispersive X-ray spectroscopy in a scanning electron microscope (SEM-EDX) are only possible for elements with an atomic number of at least 11, in samples which meet stringent requirements, and where elemental standards of well-known composition and similar chemistry are available. In practice, is often not possible to meet these criteria and low atomic number samples are increasingly requiring analysis; in these cases, qualitative or semi-quantitative EDX results can still be useful. This report describes the detector and system checks and corresponding measurement uncertainties using both conventional standards and a low atomic number ionic liquid standard containing only light elements with well-known composition. Example use cases for quantitative, semi-quantitative and qualitative EDX measurements are described and lower bound uncertainties estimated. A decision tree is provided to guide good practice in experimental approach and data analysis.

Item Type:	Report/Guide (NPL Report)
NPL Report No.:	MAT 135
Keywords:	EDX, Chemical Analysis
Subjects:	Advanced Materials > Microstructural Characterisation
Divisions:	Materials and Mechanical Metrology
Identification number/DOI:	10.47120/npl.MAT135
Last Modified:	20 Mar 2026 11:25
URI:	https://eprintspublications.npl.co.uk/id/eprint/10334