Publications
Items where Author is "Virtanen, S"
![[up]](/style/images/multi_up.png)
Up a levelGroup by: Item Type | No Grouping
Jump to: Article
Number of items: 1.
Article
Heikkinen, I T S; Koutsourakis, G; Virtanen, S; Yli-Koski, M; Wood, S; Vähänissi, V; Salmi, E; Castro, F A; Savin, H (2020) AlOx surface passivation of black silicon by spatial ALD: Stability under light soaking and damp heat exposure. Journal of Vacuum Science & Technology A, 38 (2). 022401 ISSN 0734-2101