Article

Wooldridge, J; Blackburn, J; Muniz-Piniella, A; Stewart, M; Shean, T A V; Weaver, P M; Cain, M G (2013) Finite element analysis of the vertical levitation force in an electrostatic MEMS comb drive actuator. J. Phys.: Conf. Ser., 472. 012002

Wooldridge, J; Muniz-Piniella, A; Stewart, M; Shean, T A V; Weaver, P M; Cain, M G (2013) Vertical comb drive actuator for the measurement of piezoelectric coefficients in small-scale systems. J. Micromechan. Microeng., 23 (3). 035028