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Heikkinen, I T S; Koutsourakis, G; Virtanen, S; Yli-Koski, M; Wood, S; Vähänissi, V; Salmi, E; Castro, F A; Savin, H (2020) AlOx surface passivation of black silicon by spatial ALD: Stability under light soaking and damp heat exposure. Journal of Vacuum Science & Technology A, 38 (2). 022401 ISSN 0734-2101

Heikkinen, I T S; Koutsourakis, G; Wood, S; Vähänissi, V; Castro, F A; Savin, H (2019) Stability of the surface passivation properties of atomic layer deposited aluminum oxide in damp heat conditions. AIP Conference Proceedings, 2149. 050003 ISSN 0094-243X