Article

Coupland, J M*; Mandal, R*; Palodhi, K*; Leach, R K (2013) Coherence scanning interferometry: linear theory of surface measurement. Appl. Opt., 52 (16). pp. 3662-3670.

Mandal, R*; Palodhi, K*; Coupland, J*; Leach, R K; Mansfield, D* (2012) Application of linear systems theory to characterize coherence scanning interferometry. Proc. SPIE - Int. Soc. Opt. Eng., 3430. 84600T

Conference or Workshop Item

Palodhi, K*; Coupland, J*; Leach, R K (2011) Absolute surface topography measurement of composite structures using coherence scanning interferometry. In: 11th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen 2011), 23-27 May 2011, Lake Como, Italy.

Palodhi, K*; Coupland, J M*; Leach, R K (2011) Determination of the point spread function of a coherence scanning interferometer. In: 13th International Conference on Metrology and Properties of Engineering Surfaces., 12-15 April 2011, Twickenham Stadium, UK.

Palodhi, K*; Coupland, J M*; Leach, R K (2011) Measurement of complex refractive index using microellipsometry and its relevance to surface measurement using coherence scanning interferometry. In: 13th International Conference on Metrology and Properties of Engineering Surfaces., 12-15 April 2011, Twickenham Stadium, UK.

Mandal, R*; Palodhi, K*; Coupland, J*; Leach, R K; Mansfields, D* (2011) Measurement of the point spread function in coherence scanning interferometry. In: Proceedings of the International Conference on Trends in Optics and Photonics II, 7-9 December 2011, Kolkata, India.