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Publications

Items where Author is "Meyer, P*"

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Number of items: 2.

Article

Meyer, P*; Claverley, J D; Leach, R K (2012) Quality control for deep x-ray lithography (LIGA): a preliminary metrology study. Microsyst. Technol., 18 (4). pp. 415-421.

Conference or Workshop Item

Meyer, P*; Claverley, J D; Kaiser, K*; Mohr, J*; Leach, R K (2011) Comparison of dimensional measurements of microparts made using deep x-ray lithography (LIGA): first results. In: 11th International Conference of the European Society for Prescision Engineering and Nanotechnology (euspen 2011), 23-27 May 2011, Lake Como, Italy.

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