Items where Author is "Keenan, M R"

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Zhou, Y; Franquet, A; Spampinato, V; Merkulov, A; Keenan, M R; van der Heide, P A W; Trindade, G F; Vandervorst, W; Gilmore, I S (2024) OrbiSIMS depth profiling of semiconductor materials - useful yield and depth resolution. Journal of Vacuum Science & Technology A, 42 (5). 053208

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