Koutsourakis, G; Baltusis, A; Wood, S; Blakesley, J; Castro, F A (2022) Feasibility of Novel Wafer Scale Imaging Methods for Identification of Defects in Semiconductors for Net-Zero. NPL Report. TQE 21

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Abstract

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Item Type:	Report/Guide (NPL Report)
NPL Report No.:	TQE 21
Subjects:	Advanced Materials > Non-Destructive Testing
Divisions:	Electromagnetic & Electrochemical Technologies
Identification number/DOI:	10.47120/npl.TQE21
Last Modified:	08 Sep 2022 07:28
URI:	https://eprintspublications.npl.co.uk/id/eprint/9415