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The effect of substrate geometry and surface orientation on the film structure of DLC deposited using PECVD.

Nelson, N*; Rakowski, R T*; Franks, J*; Woolliams, P; Weaver, P; Jones, B J* (2014) The effect of substrate geometry and surface orientation on the film structure of DLC deposited using PECVD. Surf. Coat. Technol., 254. pp. 73-78.

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Abstract

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Item Type: Article
Subjects: Advanced Materials
Advanced Materials > Functional Materials
Identification number/DOI: 10.1016/j.surfcoat.2014.05.066
Last Modified: 02 Feb 2018 13:14
URI: http://eprintspublications.npl.co.uk/id/eprint/6355

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