Giusca, C L; Leach, R K (2013) Calibration of the metrological characteristics of Imaging Confocal Microscopes (ICMs). Measurement Good Practice Guide. 128

Text (Measurement Good Practice Guide No. 128) mgpg128.pdf - Published Version Download (4MB)

Abstract

This document is a guide to the calibration of Inaging confocal Microscope (ICM). Methods for determining the measurement noise, flatness deviation, amplification coefficient, linearity and perpendicularity of the axes and resolution of areal surface topography measuring instruments are presented. The methods are compliant with draft international specification standards on areal surface texture.

Item Type:	Report/Guide (Measurement Good Practice Guide)
Subjects:	Engineering Measurements Engineering Measurements > Dimensional
Last Modified:	02 Feb 2018 13:14
URI:	http://eprintspublications.npl.co.uk/id/eprint/5821

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