Cumpson, P J (2000) The thickogram: a method for easy film-thickness measurement in XPS. Surf. Interface Anal., 29. pp. 403-406.

Full text not available from this repository.

Abstract

We describe a simple graphical method for measuring film thickness by XPS, which we call Thickogram. This method incorporates the effects of elastic scattering and can be used even when the film and substrate peaks have very different kinetic energies (though it is still recommended that one use peaks as close as possible in genetic energy when there is an organic contamination layer over the film).

Item Type:	Article
Subjects:	Advanced Materials
Last Modified:	02 Feb 2018 13:17
URI:	http://eprintspublications.npl.co.uk/id/eprint/3361

Actions (login required)

View Item