Awan, S A; Miall, J; Lees, K; Clarke, R N (2005) Novel 2D and 3D M/NEMS devices for accurate electromagnetic measurements. In: BEMC 2005 - British Electromagnetic Measurements Conference, 14-17 November 2005, NPL, UK.

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Abstract

A study of possible applications of 2D and 3D micro- and nano-electro-mechanical systems (M/NEMS) devices for accurate electromagnetic measurements, in particular RF and microwave (RFMW) power measurements, has recently begun at NPL. A number of novel devices have been designed and fabricated (using commercial foundries) such as 2D coplanar waveguides and RFMW power sensors, and 3D coaxial transmission lines, four terminal-pair capacitors and calculable capacitors. An outline of the devices’ design, simulation, their fabrication process and preliminary results will be presented at the conference.

Item Type:	Conference or Workshop Item (UNSPECIFIED)
Subjects:	Electromagnetics Electromagnetics > Electromagnetic Materials
Last Modified:	02 Feb 2018 13:16
URI:	http://eprintspublications.npl.co.uk/id/eprint/3323

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