Leach, R K (1995) A novel 3-axis CMM probe calibration facility. NPL Report. MOM 126

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Abstract

A facility has been developed to calibrate co-ordinate measuring machine analogue probes to an accuracy of 0.1 ­µm. A high precision three-axis translation stage moves the probe stylus and the position of the stage is determined by three mutually-orthogonal laser interferometer transducers. The co-ordinates indicated by the probe are compared with the co-ordinates indicated by the interferometers and the errors of the probe are then calculated. The working volume of the facility is 2 x 2 x 2 mm. The full measurement strategy and design considerations of the facility are discussed and results are given to demonstrate its performance.

Item Type:	Report/Guide (NPL Report)
NPL Report No.:	MOM 126
Subjects:	Engineering Measurements Engineering Measurements > Dimensional
Last Modified:	02 Feb 2018 13:19
URI:	http://eprintspublications.npl.co.uk/id/eprint/320

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