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Optimized design and process for making a DC voltage reference based on MEMS.

Kärkkäinen, A*; Awan, S A; Kyynäräinen, J*; Pekko, P*; Oja, A S*; Seppa, H* (2005) Optimized design and process for making a DC voltage reference based on MEMS. IEEE Trans. Instrum. Meas., 54 (2). pp. 563-566.

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Abstract

No abstract available

Item Type: Article
Keywords: microelectromechanical systems, capacitive sensors, micromachining, silicon on insulator (SOI), Feedback electronics
Subjects: Electromagnetics
Electromagnetics > Electrical Measurement
Last Modified: 02 Feb 2018 13:16
URI: http://eprintspublications.npl.co.uk/id/eprint/3163

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