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Depth resolution in sputter depth profiling - characterisation of a tantalum pentoxide on tantalum certified reference material.

Seah, M P; Spencer, S J; Gilmore, I S; Johnstone, J E (2000) Depth resolution in sputter depth profiling - characterisation of a tantalum pentoxide on tantalum certified reference material. Surf. Interface Anal., 29. pp. 73-81.

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Abstract

No abstract available

Item Type: Article
Subjects: Advanced Materials
Last Modified: 02 Feb 2018 13:17
URI: http://eprintspublications.npl.co.uk/id/eprint/1646

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