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COXI - Combined optical and x-ray interferometry for high precision dimensional metrology.

Basile, G*; Becker, P*; Bergamin, A*; Cavagnero, G*; Franks, A; Jackson, K; Kuetgens, U*; Mana, G*; Palmer, E W; Robbie, C J; Stedman, M; Stumpel, J*; Yacoot, A; Zosi, G* (1993) COXI - Combined optical and x-ray interferometry for high precision dimensional metrology. In: 7th International Precision Engineering Seminar, May 1993, Kobe, Japan.

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Abstract

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Last Modified: 02 Feb 2018 13:19
URI: http://eprintspublications.npl.co.uk/id/eprint/1472

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