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Design and performance of a test rig for evaluation of nanopositioning stages

Yacoot, A; Klapetek, P; Valtr, M; Grolich, P; Dongmo, H; Lazzerini, M G; Bridges, A (2019) Design and performance of a test rig for evaluation of nanopositioning stages. Measurement Science and Technology, 30 (3). 035002 ISSN 0957-0233

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Abstract

Nanopositioning stages are used in many areas of nanotechnology and advanced materials analysis, often being integrated into analytical devices such as scanning probe and optical microscopes and manufacturing devices (e.g. lithographic systems). We present a metrological instrument, together with software, designed for traceable evaluation of stage performance. The system capabilities and performance are illustrated by measurement of stages of different levels of accuracy, including a low cost custom built stage manufactured by 3D printing. The traceability of the system is described and main uncertainty sources are discussed. Guidelines are given for the specification of stage performance.

Item Type: Article
Subjects: Engineering Measurements > Dimensional
Divisions: Engineering, Materials & Electrical Science
Identification number/DOI: 10.1088/1361-6501/aafd03
Last Modified: 15 Apr 2019 13:22
URI: http://eprintspublications.npl.co.uk/id/eprint/8332

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