McKee, C*; Culshaw, B*; Leach, R (2017) Laser ultrasound measurement of diaphragm thickness, Young's modulus and Poisson's ratio in an MEMS device. IEEE J. Sel. Top. Quantum Electron., 23 (2). 2700108
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Item Type: | Article |
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Subjects: | Engineering Measurements Engineering Measurements > Dimensional |
Divisions: | Engineering, Materials & Electrical Science |
Identification number/DOI: | 10.1109/JSTQE.2016.2635518 |
Last Modified: | 02 Feb 2018 13:12 |
URI: | http://eprintspublications.npl.co.uk/id/eprint/7458 |
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