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Laser ultrasound measurement of diaphragm thickness, Young's modulus and Poisson's ratio in an MEMS device.

McKee, C*; Culshaw, B*; Leach, R (2017) Laser ultrasound measurement of diaphragm thickness, Young's modulus and Poisson's ratio in an MEMS device. IEEE J. Sel. Top. Quantum Electron., 23 (2). 2700108

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Abstract

No abstract available

Item Type: Article
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Divisions: Engineering, Materials & Electrical Science
Identification number/DOI: 10.1109/JSTQE.2016.2635518
Last Modified: 02 Feb 2018 13:12
URI: http://eprintspublications.npl.co.uk/id/eprint/7458

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