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Errors and uncertainty in the topography gained via frequency-domain analysis.

Henning, A J; Giusca, C L (2015) Errors and uncertainty in the topography gained via frequency-domain analysis. Opt. Express, 23 (18). pp. 24057-24070.

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Abstract

Frequency Domain Analysis of measurement results in three-dimensional optical microscopy is used to provide an estimate of the topography of the surface scattering the light, with nm levels of accuracy being claimed for devices that use interferometric techniques such as coherence scanning interferometers. In the following work we use simulations of the measurement result to show that the limited set of spatial frequencies passed by the instrument can lead to errors in excess of 200~nm for surfaces with curvature. In addition we present a method that takes the uncertainty in the amplitude and phase of each element of the transfer function and provides the upper and lower limit on the location of the surface provided by the Frequency Domain Analysis method. This provides an idea of the level of accuracy that the spatial frequency components must be known to in order to reproduce curved surfaces well.

Item Type: Article
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Identification number/DOI: 10.1364/OE.23.024057
Last Modified: 02 Feb 2018 13:13
URI: http://eprintspublications.npl.co.uk/id/eprint/6840

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