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Argon cluster size-dependence of sputtering yields of polymers: molecular weights and the universal equation.

Seah, M P (2015) Argon cluster size-dependence of sputtering yields of polymers: molecular weights and the universal equation. Surf. Interface Anal., 47 (1). pp. 169-172.

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Abstract

An analysis is provided of the data of Cristaudo et al for the sputtering yields of polystyrene and polymethylmethacrylate by argon cluster ion beams as a function of their molecular weight. This analysis is made using the universal sputtering equation of Seah to evaluate the effect of the end-group density on the parameter A. This parameter is thought to be related to the average energy per atom (excluding hydrogen) to liberate fragments and it is shown that A decreases as the end group density rises in the manner expected. Equations are provided relating A to the molecular weight or the end group density that are obeyed for both materials.

Item Type: Article
Keywords: Ar cluster size, GCIB, polystyrene, polymethylmethacrylate, sputtering yield, universal equation
Subjects: Nanoscience
Nanoscience > Surface and Nanoanalysis
Identification number/DOI: 10.1002/sia.5656
Last Modified: 02 Feb 2018 13:13
URI: http://eprintspublications.npl.co.uk/id/eprint/6431

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