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Practical estimation of measurement noise and flatness deviation on focus variation microscopes.

Giusca, C L; Claverley, J D; Sun, W J; Leach, R K; Helmli, F*; Chavigner, M P J* (2014) Practical estimation of measurement noise and flatness deviation on focus variation microscopes. CIRP Ann. - Manuf. Technol., 63 (1). pp. 545-548.

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Abstract

No abstract available

Item Type: Article
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Identification number/DOI: 10.1016/j.cirp.2014.03.086
Last Modified: 02 Feb 2018 13:13
URI: http://eprintspublications.npl.co.uk/id/eprint/6291

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