Leach, R K; Jones, C W; Sherlock, B; Krysinski, A* (2013) Metrology challenges for highly parallel micro-manufacture. In: 4M 2013 - Proceedings of the 10th International Conference on Multi-Material Micro Manufacture., 8-10 October 2013, San Sebastian, Spain.
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Item Type: | Conference or Workshop Item (UNSPECIFIED) |
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Subjects: | Engineering Measurements Engineering Measurements > Dimensional |
Identification number/DOI: | 10.3850/978-981-07-7247-5_432 |
Last Modified: | 02 Feb 2018 13:14 |
URI: | http://eprintspublications.npl.co.uk/id/eprint/5933 |
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