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Calibration of the scales of areal surface topography measuring instruments: Part 3 Resolution.

Giusca, C L; Leach, R K (2013) Calibration of the scales of areal surface topography measuring instruments: Part 3 Resolution. Meas. Sci. Technol., 24 (10). 105010

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Abstract

A novel method for determining the lateral resolution of areal surface topography measuring instruments is presented. The method is based on the definition of the lateral period limit and uses a type ASP (star-shaped) material measure. A coherence scanning interferometer has been used as a test case.

Item Type: Article
Keywords: optical resolution, uncertainty, surface texture
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Identification number/DOI: 10.1088/0957-0233/24/10/105010
Last Modified: 02 Feb 2018 13:14
URI: http://eprintspublications.npl.co.uk/id/eprint/5926

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