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Coherence scanning interferometry: linear theory of surface measurement.

Coupland, J M*; Mandal, R*; Palodhi, K*; Leach, R K (2013) Coherence scanning interferometry: linear theory of surface measurement. Appl. Opt., 52 (16). pp. 3662-3670.

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Abstract

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Item Type: Article
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Identification number/DOI: 10.1364/AO.52.003662
Last Modified: 02 Feb 2018 13:14
URI: http://eprintspublications.npl.co.uk/id/eprint/5854

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