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Calibration of the metrological characteristics of Coherence Scanning Interferometers (CSI) and Phase Shifting Interferometers (PSI).

Giusca, C L; Leach, R K (2013) Calibration of the metrological characteristics of Coherence Scanning Interferometers (CSI) and Phase Shifting Interferometers (PSI). Measurement Good Practice Guide. 127

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Abstract

This document is a guide to the calibration of Coherence Scanning Interferometers (CSI) and Phase Shifting Interferometers (PSI). Methods for determining the measurement noise, flatness deviation, amplification coefficient, linearity and perpendicularity of the axes and resolution of areal surface topography measuring instruments are presented.

Item Type: Report/Guide (Measurement Good Practice Guide)
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Last Modified: 02 Feb 2018 13:14
URI: http://eprintspublications.npl.co.uk/id/eprint/5820

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