< back to main site

Publications

Sub-atomic dimensional metrology: developments in the control of x-ray interferometers.

Yacoot, A; Kuetgens, U* (2012) Sub-atomic dimensional metrology: developments in the control of x-ray interferometers. Meas. Sci. Technol., 23 (7). 074003

Full text not available from this repository.

Abstract

Within the European Metrology Research Programme funded project NANOTRACE, the non-linearity of the next generation of optical interferometers has been measured using x-ray interferometry. The x-ray interferometer can be regarded as a ruler or translation stage whose graduations or displacement steps are based on the lattice spacing of the crystallographic planes from which the x-rays are diffracted: in this case the graduations are every 192 pm corresponding to the spacing between the (220) planes in silicon. Precise displacement of the x-ray interferometer's monolithic translation stage in steps corresponding to discrete numbers of x-ray fringes requires servo positioning capability at the picometre level. To achieve this very fine control, a digital control system has been developed which has opened up the potential for advances in metrology using x-ray interferometry that include quadrature counting of x-ray fringes.

Item Type: Article
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Identification number/DOI: 10.1088/0957-0233/23/7/074003
Last Modified: 02 Feb 2018 13:14
URI: http://eprintspublications.npl.co.uk/id/eprint/5475

Actions (login required)

View Item View Item