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Picometre displacements measurements using a differential Fabry-Perot optical Interferometer and an x-ray interferometer.

Celik, M*; Hamid, R*; Kuetgens, U*; Yacoot, A (2012) Picometre displacements measurements using a differential Fabry-Perot optical Interferometer and an x-ray interferometer. Meas. Sci. Technol., 23 (8). 085901

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Abstract

X-ray interferometry is emerging as an important tool for dimensional nanometrology both for sub nanometre measurement and displacement. It has been used to verify the performance of the next generation of displacement measuring optical interferometers within the European Metrology Research Programme project NANOTRACE. Within this project a more detailed set of comparison measurements between the x-ray interferometer and a Dual Channel Fabry-Perot (DFPI) optical Interferometer have been made to demonstrate the capabilities of both instruments for picometre displacement metrology. The results show good agreement between both instruments, although, some minor differences of less than 5 pm have been observed.

Item Type: Article
Keywords: Differential Fabry Perot, x-ray interferometry, dimensional nanometrology
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Identification number/DOI: 10.1088/0957-0233/23/8/085901
Last Modified: 02 Feb 2018 13:14
URI: http://eprintspublications.npl.co.uk/id/eprint/5474

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