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Advances in engineering nanometrology at the National Physical Laboratory

Leach, R K; Claverley, J D; Giusca, C; Jones, C W; Nimishakavi, L P; Sun, W; Tedaldi, M; Yacoot, A (2012) Advances in engineering nanometrology at the National Physical Laboratory. Meas. Sci. Technol., 23 (7). 074002

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Abstract

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Item Type: Article
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Identification number/DOI: 10.1088/0957-0233/23/7/074002
Last Modified: 02 Feb 2018 13:14
URI: http://eprintspublications.npl.co.uk/id/eprint/5471

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