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Comparison of the performance of the next generation of optical interferometers.

Pisani, M*; Yacoot, A; Balling, P*; Bancone, N*; Birlikseven, C*; Celik, M*; Flügge, J*; Hamid, R*; Köchert, P*; Kren, P*; Kuetgens, U*; Lassila, A*; Picotto, G B*; Sahin, E*; Seppa, J*; Tedaldi, M; Weichert, C* (2012) Comparison of the performance of the next generation of optical interferometers. Metrologia, 49 (4). pp. 455-467.

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Abstract

Six European National Measurement Institutes (NMIs) have joined forces within the European Metrology Research Programme funded project NANOTRACE to develop the next generation of optical interferometers having a target uncertainty of 10 pm. These are needed for national metrology institutes to provide improved traceable dimensional metrology that can be disseminated to the wider nanotechnology community thereby supporting the growth in nanotechnology. Several approaches were followed in order to develop the interferometers. This paper briefly describes the different interferometers developed by the various partners and presents the results of a comparison of performance of the optical interferometers by using an x-ray interferometer to generate traceable reference displacements.

Item Type: Article
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Identification number/DOI: 10.1088/0026-1394/49/4/455
Last Modified: 02 Feb 2018 13:14
URI: http://eprintspublications.npl.co.uk/id/eprint/5462

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