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An accurate and simple universal curve for the energy dependent electron inelastic mean free path.

Seah, M P (2012) An accurate and simple universal curve for the energy dependent electron inelastic mean free path. Surf. Interface Anal., 44 (4). pp. 497-503.

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Abstract

The values of inelastic mean free paths (IMFPs) calculated from optical data for the three materials categories of elements, inorganic compounds and organic compounds are re-assessed to provide a simple equation giving an estimate of the IMFP knowing only the identities of the elements in an analysed layer and the atomic density of that layer. This simple equation is required for quantification in layers of mixed elements for which the required parameters for use of the popular equation, TPP-2M, are insufficiently known. It describes the values calculated from optical data for energies above 100 eV to a similar root mean square (RMS) deviation as that of TPP-2M in the three materials categories. The RMS deviation for all three categories averages 9.4% providing the inorganic data are 'corrected' for the published sum rule errors. If only elements are identified and the atomic density is unknown, i.e. only the average Z value of the layer is known, a simpler relation is provided for the IMFP in monolayers with only one unknown parameter, Z, that exhibits an RMS deviation from the IMFPs calculated from optical data of 12.4%, reducing to 10.9% if the large atoms of elemental K and Cs are excluded.

Item Type: Article
Keywords: attenuation lengths, elements, IMFP, inelastic mean free path, inorganic materials, organic materials
Subjects: Nanoscience
Nanoscience > Surface and Nanoanalysis
Identification number/DOI: 10.1002/sia.4816
Last Modified: 02 Feb 2018 13:14
URI: http://eprintspublications.npl.co.uk/id/eprint/5395

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