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Comparison of dimensional measurements of microparts made using deep x-ray lithography (LIGA): first results.

Meyer, P*; Claverley, J D; Kaiser, K*; Mohr, J*; Leach, R K (2011) Comparison of dimensional measurements of microparts made using deep x-ray lithography (LIGA): first results. In: 11th International Conference of the European Society for Prescision Engineering and Nanotechnology (euspen 2011), 23-27 May 2011, Lake Como, Italy.

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Abstract

Deep X-ray Lithography (DXRL) allows the production of high aspect ratio 2.5 dimensional polymer structures with quasi perfect side-wall verticality and optical quality roughness. These structures can then be used as templates for mass production of metals or ceramic microparts. Measuring such microstructures; for example metal gears with about 2 mm thickness and a diameter of about 1 mm or less is not an easy task. To test different techniques and compare their results, a round-robin test has been started. A set of x-ray LIGA artefact is send to different organisations for dimensional measurements (3D). Different techniques (CMM, infinite focus variation technique) should be used. The different artefacts cover a large range of dimensions. We present here the first results using two different CMMs.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Last Modified: 02 Feb 2018 13:14
URI: http://eprintspublications.npl.co.uk/id/eprint/5009

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