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Methods for determining and processing 3D errors and uncertainties for AFM data analysis.

Klapetek, P*; Nacas, D*; Campbellova, A*; Yacoot, A; Koenders, L* (2011) Methods for determining and processing 3D errors and uncertainties for AFM data analysis. Meas. Sci. Technol., 22 (2). 025501

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Abstract

Algorithms have been developed for determining and processing the uncertainties for SPM measurements. In contract to the traditional approach of calculating the uncertainty associated with each axis separately, a three dimensional approach has been used to obtain local values of positioning error and uncertainty. These algorithms are applicable both to commercial SPMs and more sophisticated metrology SPMs. This data can be used within nearly all the standard SPM data processing algorithms to determine local values of uncertainty. If the error function of the scanning system is determined for whole measurement volume of an SPM, it can be converted to yield local uncertainty values that can in turn be used for evaluation of uncertainties related to the acquired data and for further data processing within direct or statistical measurements. Routines presented within this paper have been incorporated into the open source software Gwyddion (http://gwyddion.net/) to make them available for the SPM community. Examples for different SPM scanning systems are presented.

Item Type: Article
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Identification number/DOI: 10.1088/0957-0233/22/2/025501
Last Modified: 02 Feb 2018 13:14
URI: http://eprintspublications.npl.co.uk/id/eprint/4876

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