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Introductory guide to nanometrology.

Hansen, P-E*; Roebben, G*; Babick, F*; Boyd, R; Braun, A*; Busch, I*; Danzebrink, H-U*; Depero, L*; Dirscherl, K*; Dziomba, T*; Eriksson, E*; Franks, K*; Gee, M G; Jennett, N M; Kestens, V*; Koenders, L*; Krumrey, M*; Lausmaa, J*; Leach, R K; Pendrill, L*; Pidduck, A*; Put, S*; Roy, D; Stintz, M*; Turan, R*; Yacoot, A (2010) Introductory guide to nanometrology. Technical Report. European Commission.

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Abstract

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Item Type: Report/Guide (Technical Report)
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Publisher: European Commission
Last Modified: 02 Feb 2018 13:15
URI: http://eprintspublications.npl.co.uk/id/eprint/4863

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