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A novel three-axis vibrating micro-CMM probe with isotropic probing forces.

Claverley, J D; Leach, R K (2010) A novel three-axis vibrating micro-CMM probe with isotropic probing forces. In: Proceedings of the 10th International Conference of the European Society for Precision Engineering & Nanotechnology (euspen), 31 May - 4 June 2010, Delft, Netherlands.

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Abstract

Over the past decade there have been a number of new designs and realisations of micro-CMM probes. However, there are still some issues with probe design that need addressing. For example, many probe designs have relatively high probing forces, or long over-travel distances potentially resulting in damage to the object being measured; surface forces can adversely affect the performance of probes that do not operate in an oscillatory mode; some probes do not operate in three axes and many do not operate with equal probing forces in each of their axes. The probe design presented in this paper addresses all of these issues. The new probe uses a triskelion flexure arrangement with in-built piezoelectric sensing and actuation to allow oscillatory behaviour that ensures that the probing direction is always normal to the surface of the object being measured. The design of the probe is presented along with the results from preliminary experiments to verify the design considerations.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Last Modified: 02 Feb 2018 13:15
URI: http://eprintspublications.npl.co.uk/id/eprint/4706

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