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Static SIMS - VAMAS interlaboratory study for intensity repeatability, mass scale accuracy and relative quantification.

Green, F M; Gilmore, I S; Lee, J L S; Spencer, S J; Seah, M P (2010) Static SIMS - VAMAS interlaboratory study for intensity repeatability, mass scale accuracy and relative quantification. Surf. Interface Anal., 42 (3). pp. 129-138.

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Abstract

An interlaboratory study involving 19 Time-of-Flight Static SIMS instruments from 12 countries has been conducted. Analysts were supplied, by NPL, with a protocol for analysis together with three reference materials; poly(tetrafluoroethylene) (PTFE), a thin layer of polycarbonate (PC) on a silicon wafer and a patterned Irganox sample with different amounts of Irganox 1010 in each of four quadrants on a silicon wafer. The objectives of the study are to (i) to determine the repeatability and constancy of the relative intensity scale achievable using the draft ISO standard (DIS 23830), (ii) to evaluate the effectiveness of the mass scale calibration and optimisation procedure and (iii) to evaluate the current capability of relative quantification using static SIMS.

The results of this study show that the constancy of the relative intensity scale is approximately 5%. This is excellent and demonstrates that static SIMS measurements are significantly more stable than is often thought by analysts. Additionally, this demonstrates the practical use of the draft standard which has since been published as ISO 23830. The draft ISO standard CD 13084 for calibration of the mass scale in time-of-flight SIMS was evaluated and found to be consistent with our previous study. Four laboratories optimised the instrument mass calibration accuracy using this procedure leading to improvements in the mass scale calibration by factors of 1.8, 2.2, 2.3 and 8.6. Evaluation of the capability of SIMS for relative quantification is challenging, especially in the provision of a suitable reference material. Using a novel patterned Irganox sample it is shown that the precision of measurement may be as high as 5% for 16 instruments - this is a remarkable result. Further work is required to develop more robust and stable reference materials.

Item Type: Article
Keywords: static SIMS, ToF-SIMS, standardisation, relative quantification, repeatability, constancy, mass scale calibration
Subjects: Nanoscience
Nanoscience > Surface and Nanoanalysis
Last Modified: 02 Feb 2018 13:15
URI: http://eprintspublications.npl.co.uk/id/eprint/4612

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