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Development and characterisation of a new instrument for the traceable measurement of areal surface texture.

Leach, R K; Giusca, C L; Naoi, K* (2009) Development and characterisation of a new instrument for the traceable measurement of areal surface texture. Meas. Sci. Technol., 20 (12). 125102

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Abstract

Modern manufacturing industry is beginning to benefit greatly from the ability to control the three dimensional, or areal, structure of a surface. To underpin areal surface manufacturing, a traceable measurement infrastructure is required. This paper presents the development of a new traceable instrument for the measurement of areal surface texture. The instrument uses a two-axis coplanar air-bearing slideway to move the surface being measured under a stylus probe. The deflection of the slideway is measured using linear and angular interferometers. The stylus probe incorporates a cylindrical air-bearing guideway and an electromagnetic system to maintain a constant stylus force on the surface. The deflection of the stylus is measured using a differential plane mirror interferometer that minimises any error motion in the metrology frame. The uncertainty of the instrument is calculated using a Monte Carlo approach and is around 5 nm in the z axis, and 16 nm in the x and y axes (all at k = 2). Results are given for the instrument compared to a traceable profile measuring instrument and a coherence scanning interferometer.

Item Type: Article
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Last Modified: 02 Feb 2018 13:15
URI: http://eprintspublications.npl.co.uk/id/eprint/4517

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