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Results from a comparison of optical thin film thickness measurement.

Leach, R K; Giusca, C (2009) Results from a comparison of optical thin film thickness measurement. NPL Report. ENG 18

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Abstract

In this report we present the results of a comparison of non-contact methods for measuring the thickness of thin film artefacts. Only well-controlled calibration artefacts have been measured to assess the base-line measurement capability of instruments used in industry. With the exception of those from one instrument, the results show agreement between the methods, and with the calibrated values, to within 2 % of the nominal height.

Item Type: Report/Guide (NPL Report)
NPL Report No.: ENG 18
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Last Modified: 02 Feb 2018 13:15
URI: http://eprintspublications.npl.co.uk/id/eprint/4460

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