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Assembly of the stem and tip of an innovative micro-CMM probe.

Smale, D*; Ratchev, S*; Segal, J*; Leach, R K; Claverley, J D (2009) Assembly of the stem and tip of an innovative micro-CMM probe. In: 9th International Conference and Exhibition on Laser Meterology, Machine Tool, CMM and Robotic Performance (LAMDAMAP 2009), 2009.

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Abstract

The measurement and quantification of features and products from the microscale and precision manufacturing industries often requires uncertainties and resolution of the order of nanometers. A suitable means of delivering these requirements is through ultra precision co-ordinate measuring machines (CMMs). However, the current state-of-the-art CMMs are often restricted by the relatively large and insensitive probes used. This paper focuses on the assembly challenges of a novel micro-CMM probe as well as the techniques and equipment used to resolve these challenges. The probe comprises a 70 µm diameter, rigid tungsten carbide shaft on the end of which is attached a 100 µm diameter glass sphere. This joint must be made without damaging the glass sphere or the tungsten carbide shaft. The primary assembly requirement is to ensure that the sphere is located centrally with respect to the shaft. Two joining methods, utilising a nanometre resolution assembly platform and micro-manipulators integrated within a combined focused ion beam and scanning electron microscope, were tested and compared. These joining methods were also carefully developed to ensure that they could be scaled down to be reproducible on shaft and sphere diameters of 30 µm and 50 µm respectively. The work has delivered a number of prototype probes that have been characterised. These prototypes will be used for testing and validation of the probe design and modelling.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Last Modified: 02 Feb 2018 13:15
URI: http://eprintspublications.npl.co.uk/id/eprint/4450

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