Clifford, C A; Seah, M P (2009) Nanoindentation measurement of Young's modulus for compliant layers on stiffer substrates including the effect of Poisson's ratios. Nanotechnology, 20 (14). 145708

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Abstract

Finite element analysis (FEA) is used to investigate the effect of the Poisson's ratios of both the overlayer and the substrate on the nanoindentation of an elastic two-phase system where the elastic overlayer is more compliant than the underlying elastic substrate. A rigid spherical indenter is used as a probe. It is found that nanoindentation results may be expressed analytically by a simple extension to the previously described equation [C A Clifford, MP Seah, Nanotechnology 17 5283 (2006)]. This produces a simple function that describes the reduced modulus value measured using Oliver and Pharr's method for any modulus values or Poisson's ratio values of the overlayer and substrate, overlayer thickness or indenter tip radius. This equation and the FEA behind it are tested using experimental published data for a silicon dioxide layer on silicon.

Item Type:	Article
Keywords:	AFM, nanoidentation, modelling
Subjects:	Nanoscience
Last Modified:	02 Feb 2018 13:15
URI:	http://eprintspublications.npl.co.uk/id/eprint/4394

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