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Metrology for micro- and nanotechnology: some perspectives on requirements.

Leach, R K (2008) Metrology for micro- and nanotechnology: some perspectives on requirements. Micro Manufacturing, 08 (08). pp. 18-21.

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Abstract

No abstract available

Item Type: Article
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Last Modified: 02 Feb 2018 13:15
URI: http://eprintspublications.npl.co.uk/id/eprint/4234

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