Leach, R K (2008) Metrology for micro- and nanotechnology: some perspectives on requirements. Micro Manufacturing, 08 (08). pp. 18-21.

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Item Type:	Article
Subjects:	Engineering Measurements Engineering Measurements > Dimensional
Last Modified:	02 Feb 2018 13:15
URI:	http://eprintspublications.npl.co.uk/id/eprint/4234

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