Leach, R K (2008) Metrology for micro- and nanotechnology: some perspectives on requirements. Micro Manufacturing, 08 (08). pp. 18-21.
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Item Type: | Article |
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Subjects: | Engineering Measurements Engineering Measurements > Dimensional |
Last Modified: | 02 Feb 2018 13:15 |
URI: | http://eprintspublications.npl.co.uk/id/eprint/4234 |
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