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Aspects of scanning force microscope (SFM) cantilevers and tips and their effects on dimensional measurement.

Yacoot, A; Koenders, L* (2008) Aspects of scanning force microscope (SFM) cantilevers and tips and their effects on dimensional measurement. J. Phys. D, Appl. Phys., 41 (10). 103001

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Abstract

The review will describe the various SPM tips and cantilevers used today. Work undertaken to quantify the properties of cantilevers and tips, e.g. shape and radius, is reviewed together with an overview of the various tip sample interactions that affect dimensional measurements

Item Type: Article
Keywords: AFM, MFM, tip reconstruction, SFM, resonance modes, non-contact, contact mode, functional tips.
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Last Modified: 02 Feb 2018 13:15
URI: http://eprintspublications.npl.co.uk/id/eprint/4121

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