< back to main site

Publications

Monitoring MEMS motion under vacuum.

Lowe, M (2007) Monitoring MEMS motion under vacuum. In Focus (1). p. 4.

Full text not available from this repository.

Abstract

An environmental chamber integrated with a polytec MSA-400 micro-scanning laser doppler vibrometer for use in characterising MEMS devices.

Item Type: Article
Keywords: MEMS, Vibrometry
Subjects: Nanoscience
Nanoscience > Nano-Materials
Last Modified: 02 Feb 2018 13:15
URI: http://eprintspublications.npl.co.uk/id/eprint/3898

Actions (login required)

View Item View Item