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Review of x-ray and optical thin film measurement methods and transfer artefacts.

Yacoot, A; Leach, R K (2007) Review of x-ray and optical thin film measurement methods and transfer artefacts. NPL Report. DEPC-EM 013

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Abstract

This report presents the results of a review of methods for the thickness measurement of thin transparent films in the range from 1 nm to 5 µm. X-ray and optical methods for film thickness measurement are compared and other parameters that can also be measured are highlighted, such as optical constants, crystallographic orientation and surface texture. The work being carried out in other national measurement institutes is discussed and commercially available thickness transfer artefacts listed.

Item Type: Report/Guide (NPL Report)
NPL Report No.: DEPC-EM 013
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Last Modified: 02 Feb 2018 13:15
URI: http://eprintspublications.npl.co.uk/id/eprint/3847

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