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Overview of MEMS sensors and the metrology requirements for their manufacture. NMS Programme for Engineering Measurement 2005-2008.

Reilly, S P; Leach, R K; Cuenat, A; Awan, S A; Lowe, M (2006) Overview of MEMS sensors and the metrology requirements for their manufacture. NMS Programme for Engineering Measurement 2005-2008. NPL Report. DEPC-EM 008

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Abstract

The MEMS sensor market is growing rapidly. However, the metrology that supports the fabrication of MEMS sensors is struggling to keep pace with the expanding limits of MEMS technology. The purpose of this report is to gauge the metrological requirements of the MEMS industry, review current MEMS manufacturing and metrology techniques, and highlight how metrology affects some of the key types of MEMS sensor (pressure sensors, accelerometers, gyroscopes, RF sensors and microfluidics). The metrology techniques reviewed include profilometry, micro co-ordinate measuring machines, electron microscopy, optical microscopy, white light interferometry and laser Doppler velocimetry. The emphasis is on dimensional metrology although other measurements are covered where appropriate. Finally, the report summarises the metrology requirements of the UK MEMS industry based on discussions with the key UK companies.

Item Type: Report/Guide (NPL Report)
NPL Report No.: DEPC-EM 008
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Last Modified: 02 Feb 2018 13:15
URI: http://eprintspublications.npl.co.uk/id/eprint/3658

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