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An optical workstation for characterisation and modification of MEMS.

Hedley, J*; Burdess, J S*; Harris, A J*; Gallacher, B J*; McNeil, C J*; Cumpson, P J; Enderling, S* (2004) An optical workstation for characterisation and modification of MEMS. Proc. SPIE - Int. Soc. Opt. Eng., 5458. pp. 244-252.

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Abstract

No abstract available

Item Type: Article
Subjects: Nanoscience
Last Modified: 02 Feb 2018 13:16
URI: http://eprintspublications.npl.co.uk/id/eprint/3386

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