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Measuring the metrology gap: three dimensional metrology at the mesoscopic level.

Peggs, G N; Lewis, A J; Leach, R K (2004) Measuring the metrology gap: three dimensional metrology at the mesoscopic level. J. Manuf. Process., 6 (1). pp. 117-124.

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Abstract

There is a host of instruments, such as height gauges, micrometers and co-ordinate measuring machines (CMMs), designed to measure macroscopic features on mass-produced components. Equally, there are many instruments designed to measure surface features at the nanometre scale, for example, the atomic force microscope. However, there is a dearth of instruments capable of measuring tiny objects with small features at the micrometre scale.
As a first step to develop metrology tools to operate in the mesoscopic regime, NPL has designed and manufactured a small component CMM with a 50 x 50 x 50 mm measuring volume and a volumetric uncertainty better than 100 nm (95% confidence interval). It is one of a group of such instruments being developed in several European research institutes. An overview of the current research on small CMMs is given before looking in detail at the NPL instrument. Current work at NPL on the development of probing systems for use at even smaller scales is then described. One aspect of NPL's research work in dimensional metrology is targeted at developing the next generation of micro-scale CMMs.

Item Type: Article
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Last Modified: 02 Feb 2018 13:16
URI: http://eprintspublications.npl.co.uk/id/eprint/2996

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