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Metrology for microsystems - characterisation of a new broadband interferometer.

Lee-Bennett, I*; Leach, R K (2004) Metrology for microsystems - characterisation of a new broadband interferometer. In: 4th euspen International Conference, 31 May 2004 - 2 June 2004, Glasgow, UK.

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Abstract

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Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Last Modified: 02 Feb 2018 13:16
URI: http://eprintspublications.npl.co.uk/id/eprint/2943

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