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Design of a co-ordinate measuring probing system for characterising three-dimensional micro-structures.

Leach, R K; Murphy, J; Wilson, A (2004) Design of a co-ordinate measuring probing system for characterising three-dimensional micro-structures. NPL Report. CBTLM 30

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Abstract

This report describes research towards a prototype probing system that can be used to determine the geometrical co-ordinates of points on the surface of a three-dimensional micro-structure. Most commercial instruments designed to measure dimensions of micrometre-sized features are essentially planar measuring instruments – they usually have limited range in at least one axis and were originally designed with surface topography measurement in mind. Recent comparisons of commercial systems that measure surface topography give large spreads in the measurement results and it is asserted that this is due primarily to a lack of suitable traceability of the measurements. The report includes a literature review of the current methods for measuring micro-scale components and/or surface topography and this information was used to make a decision on the type of probe that was developed and reported here. The probe described here is capable of measuring three-dimensional features of high aspect ratio, for example, deep trenches, sidewalls and nozzles. The probe is constructed using micro-machining techniques that are described in this report. It is expected that the probe will eventually form the basis for a co-ordinate measuring machine that will be capable of calibrating transfer artefacts that can in-turn be used to calibrate the more versatile commercial measuring instruments.

Item Type: Report/Guide (NPL Report)
NPL Report No.: CBTLM 30
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Last Modified: 02 Feb 2018 13:16
URI: http://eprintspublications.npl.co.uk/id/eprint/2901

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