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Ultra-thin SiO2 on Si: IV, thickness linearity and intensity measurements in XPS.

Seah, M P; Spencer, S J (2003) Ultra-thin SiO2 on Si: IV, thickness linearity and intensity measurements in XPS. Surf. Interface Anal., 35. pp. 515-524.

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Abstract

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Item Type: Article
Subjects: Nanoscience
Nanoscience > Surface and Nanoanalysis
Last Modified: 02 Feb 2018 13:17
URI: http://eprintspublications.npl.co.uk/id/eprint/2814

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