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Summary of ISO/TC 201 standard XII. ISO 17973:2002 - Surface chemical analysis - medium-resolution Auger electron spectrometers - calibration of energy scales for elemental analysis.

Seah, M P (2003) Summary of ISO/TC 201 standard XII. ISO 17973:2002 - Surface chemical analysis - medium-resolution Auger electron spectrometers - calibration of energy scales for elemental analysis. Surf. Interface Anal., 35. pp. 329-330.

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Abstract

This International Standard specifies a method for calibrating the kinetic energy scale of Auger electron spectrometers with an uncertainty of 3 eV for general analytical use for identifying elements at surfaces. It is suitable for instruments used in either the direct mode or the differential mode where the resolution is equal to or less than 0.5% and the modulation amplitude for the differential mode, if used, is 2 eV peak to peak. The spectrometer shall be equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy. This International Standard further specifies a calibration schedule.

Item Type: Article
Subjects: Nanoscience
Nanoscience > Surface and Nanoanalysis
Last Modified: 02 Feb 2018 13:17
URI: http://eprintspublications.npl.co.uk/id/eprint/2599

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